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Search for "out-of-plane nanopatterning" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.
Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams
Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151
- irradiation-induced mechanical strain in the patterning process are elaborated and discussed. Keywords: direct patterning; focused helium ion beam; out-of-plane nanopatterning; polymers; thin films; Introduction Micro- and nanofabrication with focused ion beams (FIBs) is currently a subject of strong
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